A Simple and Robust Fabrication Process for SU-8 In-Plane MEMS Structures
In this paper, a simple fabrication process for SU-8 in-plane micro electro-mechanical systems (MEMS) structures, called “border-bulk micromachining”, is introduced. It aims to enhance the potential of SU-8 MEMS structures for applications such as low-cost/disposable microsystems...
| Main Authors: | , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2020-03-01
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| Series: | Micromachines |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2072-666X/11/3/317 |