Study on the performance of MOS - based displacement sensor
The AZO film has a laser-induced lateral photovoltage (LPV): the saturation values of this photovoltage vary linearly with the position of laser spot. While, we coated a diatomite film on position sensitive detectors based on AZO-SiO2-Si structure. Sensitivity and saturation power are apparently imp...
| Main Authors: | , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
EDP Sciences
2018-01-01
|
| Series: | MATEC Web of Conferences |
| Online Access: | https://doi.org/10.1051/matecconf/201823204089 |
| Summary: | The AZO film has a laser-induced lateral photovoltage (LPV): the saturation values of this photovoltage vary linearly with the position of laser spot. While, we coated a diatomite film on position sensitive detectors based on AZO-SiO2-Si structure. Sensitivity and saturation power are apparently improved, and the sensitivity reached 108.1mw/mm for the transient peak value. Maximum saturation voltage reached 72.1mw. This work demonstrates a novel way to increase sensitivity for position sensitive detectors. |
|---|---|
| ISSN: | 2261-236X |