Fabrication of Si3N4-Based Artificial Basilar Membrane with ZnO Nanopillar Using MEMS Process
This paper presents the fabrication of Si3N4-based artificial basilar membrane (ABM) with ZnO nanopillar array. Structure of ABMs is composed of the logarithmically varying membrane fabricated by MEMS process and piezonanopillar array grown on the Si3N4-based membrane by hydrothermal method. We fabr...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Hindawi Limited
2017-01-01
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| Series: | Journal of Sensors |
| Online Access: | http://dx.doi.org/10.1155/2017/1308217 |