A Measuring Method for Nano Displacement Based on Fusing Data of Self-Sensing and Time-Digit-Conversion

A Measuring Method for Nano Displacement Based on Fusing Data of Self-Sensing and Time-Digit-Conversion

Accurate and rapid measuring methods for displacement of nano-scale is necessary for manipulation. Self-sensing and time-digit-conversion(TDC) are two applicable measuring methods especially suitable for room-limited workspaces and vacuum-compliance required applications, thanks to their space-savin...

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Bibliographic Details
Main Authors: Zhangming Du, Chao Zhou, Tianlu Zhang, Lu Deng, Zhiqiang Cao, Long Cheng
Format: Article
Language:English
Published: IEEE 2019-01-01
Series:IEEE Access
Subjects:
Nano-scale measurement
multi-rate fusion
self-sensing
TDC
Online Access:https://ieeexplore.ieee.org/document/8935219/

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