A Measuring Method for Nano Displacement Based on Fusing Data of Self-Sensing and Time-Digit-Conversion
Accurate and rapid measuring methods for displacement of nano-scale is necessary for manipulation. Self-sensing and time-digit-conversion(TDC) are two applicable measuring methods especially suitable for room-limited workspaces and vacuum-compliance required applications, thanks to their space-savin...
| Main Authors: | , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
IEEE
2019-01-01
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| Series: | IEEE Access |
| Subjects: | |
| Online Access: | https://ieeexplore.ieee.org/document/8935219/ |