DOUBLE BOSS SCULPTURED DIAPHRAGM EMPLOYED PIEZORESISTIVE MEMS PRESSURE SENSOR WITH SILICON-ON-INSULATOR (SOI)
This paper presents the detailed study on the measurement of low pressure sensor using double boss sculptured diaphragm of piezoresistive type with MEMS technology in flash flood level measurement. The MEMS based very thin diaphragms to sense the low pressure is analyzed by introducing supports to a...
| Main Authors: | , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
Taylor's University
2017-07-01
|
| Series: | Journal of Engineering Science and Technology |
| Subjects: | |
| Online Access: | http://jestec.taylors.edu.my/Vol%2012%20issue%207%20July%202017/12_7_2.pdf |