Room-temperature synthesis of earth-abundant semiconductor ZnSiN2 on amorphous carbon
Abstract This manuscript reports room-temperature one-step synthesis of earth-abundant semiconductor ZnSiN2 on amorphous carbon substrates using radio frequency reactive magnetron co-sputtering. Transmission Electron Microscopy and Rutherford Backscattering Spectrometry analysis demonstrated that th...
Main Authors: | , , , , |
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Format: | Article |
Language: | English |
Published: |
Nature Publishing Group
2021-02-01
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Series: | Scientific Reports |
Online Access: | https://doi.org/10.1038/s41598-021-82845-6 |
Summary: | Abstract This manuscript reports room-temperature one-step synthesis of earth-abundant semiconductor ZnSiN2 on amorphous carbon substrates using radio frequency reactive magnetron co-sputtering. Transmission Electron Microscopy and Rutherford Backscattering Spectrometry analysis demonstrated that the synthesis has occurred as ZnSiN2 nanocrystals in the orthorhombic phase, uniformly distributed on amorphous carbon. The technique of large-area deposition on an amorphous substrate can be interesting for flexible electronics technologies. Our results open possibilities for environmentally friendly semiconductor devices, leading to the development of greener technologies. |
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ISSN: | 2045-2322 |