Scanning transmission imaging in the helium ion microscope using a microchannel plate with a delay line detector

Scanning transmission imaging in the helium ion microscope using a microchannel plate with a delay line detector

A detection system based on a microchannel plate with a delay line readout structure has been developed to perform scanning transmission ion microscopy (STIM) in the helium ion microscope (HIM). This system is an improvement over other existing approaches since it combines the information of the sca...

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Bibliographic Details
Main Authors: Eduardo Serralta, Nico Klingner, Olivier De Castro, Michael Mousley, Santhana Eswara, Serge Duarte Pinto, Tom Wirtz, Gregor Hlawacek
Format: Article
Language:English
Published: Beilstein-Institut 2020-12-01
Series:Beilstein Journal of Nanotechnology
Subjects:
bright-field
channeling
dark-field
delay line detector
helium ion microscopy
scanning transmission ion microscopy
Online Access:https://doi.org/10.3762/bjnano.11.167

Internet

https://doi.org/10.3762/bjnano.11.167

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