Review on the Modeling of Electrostatic MEMS

Review on the Modeling of Electrostatic MEMS

Electrostatic-driven microelectromechanical systems devices, in most cases, consist of couplings of such energy domains as electromechanics, optical electricity, thermoelectricity, and electromagnetism. Their nonlinear working state makes their analysis complex and complicated. This article introduc...

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Bibliographic Details
Main Authors: Wan-Chun Chuang, Hsin-Li Lee, Pei-Zen Chang, Yuh-Chung Hu
Format: Article
Language:English
Published: MDPI AG 2010-06-01
Series:Sensors
Subjects:
electrostatics
electromechanics
MEMS
pull-in voltage
Online Access:http://www.mdpi.com/1424-8220/10/6/6149/
Description
Summary:Electrostatic-driven microelectromechanical systems devices, in most cases, consist of couplings of such energy domains as electromechanics, optical electricity, thermoelectricity, and electromagnetism. Their nonlinear working state makes their analysis complex and complicated. This article introduces the physical model of pull-in voltage, dynamic characteristic analysis, air damping effect, reliability, numerical modeling method, and application of electrostatic-driven MEMS devices.
ISSN:1424-8220

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