Ferroelectricity, Piezoelectricity, and Dielectricity of 0.06PMnN-0.94PZT(45/55) Thin Film on Silicon Substrate

Ferroelectricity, Piezoelectricity, and Dielectricity of 0.06PMnN-0.94PZT(45/55) Thin Film on Silicon Substrate

The high piezoelectricity and high quality factor ferroelectric thin films are important for electromechanical applications especially the micro electromechanical system (MEMS). The ternary compound ferroelectric thin films 0.06Pb(Mn1/3, Nb2/3)O3 + 0.94Pb(Zr0.45, Ti0.55)O3 (0.06PMnN-0.94PZT(45/55))...

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Bibliographic Details
Main Authors:	Tao Zhang, Hailong Li, Chenlei Zhou, Huaze Zhu, Yahong Zhou, Fujun Liang, Huafeng Pang, Limei Hao, Shaorong Li
Format:	Article
Language:	English
Published:	Hindawi Limited 2015-01-01
Series:	Journal of Nanomaterials
Online Access:	http://dx.doi.org/10.1155/2015/864591

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