Combined metal-assisted chemical etching and anisotropic wet etching for anti-reflection inverted pyramidal cavities on dendrite-like textured substrates

Combined metal-assisted chemical etching and anisotropic wet etching for anti-reflection inverted pyramidal cavities on dendrite-like textured substrates

A simple and low-cost method using the combination of metal-assisted chemical etching (MacEtch) and anisotropic wet etching was performed to fabricate anti-reflection inverted pyramidal cavities on dendrite-like textured silicon substrates. To achieve this, a thin Ag film was deposited on an n-type...

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Bibliographic Details
Main Authors:	Yu-Keng Lin, Yen-Shin Chen, Chun-Hway Hsueh
Format:	Article
Language:	English
Published:	Elsevier 2019-03-01
Series:	Results in Physics
Online Access:	http://www.sciencedirect.com/science/article/pii/S2211379718330109

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