The Automatic Control of Vacuum Deposition Plants

The Automatic Control of Vacuum Deposition Plants

Bibliographic Details
Main Authors:	M. N. Khan, D. A. Rutherford
Format:	Article
Language:	English
Published:	SAGE Publishing 1984-12-01
Series:	Measurement + Control
Online Access:	https://doi.org/10.1177/002029408401701103

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