Effects of the Manufacturing Process on the Reliability of the Multilayer Structure in MetalMUMPs Actuators: Residual Stresses and Variation of Design Parameters

Effects of the Manufacturing Process on the Reliability of the Multilayer Structure in MetalMUMPs Actuators: Residual Stresses and Variation of Design Parameters

Potential problems induced by the multilayered manufacturing process pose a serious threat to the long-term reliability of MEMSCAP® actuators under in-service thermal cycling. Damage would initiate and propagate in different material layers because of a large mismatch of their thermal expansions. In...

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Bibliographic Details
Main Authors: Jianbin Guo, Jinling Wang, Shengkui Zeng, Vadim V. Silberschmidt, Yongguang Shen
Format: Article
Language:English
Published: MDPI AG 2017-11-01
Series:Micromachines
Subjects:
micro electromechanical systems (MEMS)
residual stresses
subdomain method
manufacturing process
multilayer structure
Online Access:https://www.mdpi.com/2072-666X/8/12/348

Internet

https://www.mdpi.com/2072-666X/8/12/348

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