Optical surface measurements of a wavelength-tuned Fizeau interferometer based on an optical power, real-time feedback and compensation system
The wavelength-tuned Fizeau interferometer achieves the desired phase for interferograms based on the use of a phase-shifting technique. It can then use it to measure the surface and thickness of a parallel transparent object. However, phase errors occur owing to the inherent changes of the power of...
| Main Authors: | , |
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| Format: | Article |
| Language: | English |
| Published: |
Elsevier
2020-03-01
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| Series: | Results in Physics |
| Subjects: | |
| Online Access: | http://www.sciencedirect.com/science/article/pii/S2211379719328967 |