Sensitivity Improvement to Active Piezoresistive AFM Probes Using Focused Ion Beam Processing

Sensitivity Improvement to Active Piezoresistive AFM Probes Using Focused Ion Beam Processing

This paper presents a comprehensive modeling and experimental verification of active piezoresistive atomic force microscopy (AFM) cantilevers, which are the technology enabling high-resolution and high-speed surface measurements. The mechanical structure of the cantilevers integrating Wheatstone pie...

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Bibliographic Details
Main Authors: Piotr Kunicki, Tihomir Angelov, Tzvetan Ivanov, Teodor Gotszalk, Ivo Rangelow
Format: Article
Language:English
Published: MDPI AG 2019-10-01
Series:Sensors
Subjects:
mems
silicon cantilever
fib modifications
fem
Online Access:https://www.mdpi.com/1424-8220/19/20/4429

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