Selective Transfer of Si Thin-Film Microchips by SiO<sub>2</sub> Terraces on Host Chips for Fluidic Self-Assembly

Selective Transfer of Si Thin-Film Microchips by SiO<sub>2</sub> Terraces on Host Chips for Fluidic Self-Assembly

Fluidic self-assembly is a versatile on-chip integration method. In this scheme, a large number of semiconductor microchips are spontaneously deposited onto a host chip. The host chip typically comprises a Si substrate with an array of pockets at the designated microchip placement sites. In this stu...

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Bibliographic Details
Main Authors: Yutaka Fujita, Shoji Ishihara, Yuki Nakashima, Kosuke Nishigaya, Katsuaki Tanabe
Format: Article
Language:English
Published: MDPI AG 2021-02-01
Series:Applied Mechanics
Subjects:
semiconductor
silicon
thin film
layer transfer
self-assembly
integration
Online Access:https://www.mdpi.com/2673-3161/2/1/2

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