Good-Quality and High-Efficiency Dicing for Thick LiNbO<sub>3</sub> Wafers Using Picosecond Laser Pulses
Lithium niobate (LiNbO<sub>3</sub>) has become popular with applications in electronics and communication industries due to its excellent electro-optical and nonlinear properties. This paper presents the influence of laser power, repetition frequency, number of subpulses, depth of each p...
| Main Authors: | , , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2019-12-01
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| Series: | Micromachines |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2072-666X/11/1/51 |