Microscopic study of stress effects around micro-crack tips using a non-contact stress-induced light scattering method

Fine-polishing techniques may cause micro-cracks under glass substrate surfaces. According to highly requirement from production field, a thermal stress-induced light scattering method (T-SILSM) was successfully developed for a non-contact inspection to detect the micro-cracks through changing in th...

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Bibliographic Details
Main Authors: Y. Sakata, N. Terasaki, K. Nonaka
Format: Article
Language:English
Published: AIP Publishing LLC 2016-09-01
Series:AIP Advances
Online Access:http://dx.doi.org/10.1063/1.4963673