Perspective: New process technologies required for future devices and scaling

Perspective: New process technologies required for future devices and scaling

This paper presents an overview and perspective on processing technologies required for continued scaling of leading edge and emerging semiconductor devices. We introduce the main drivers and trends affecting future semiconductor device scaling and provide examples of emerging devices and architectu...

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Bibliographic Details
Main Authors:	R. Clark, K. Tapily, K.-H. Yu, T. Hakamata, S. Consiglio, D. O’Meara, C. Wajda, J. Smith, G. Leusink
Format:	Article
Language:	English
Published:	AIP Publishing LLC 2018-05-01
Series:	APL Materials
Online Access:	http://dx.doi.org/10.1063/1.5026805

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