Plasma-Treated CVD Graphene Gas Sensor Performance in Environmental Condition: The Role of Defects on Sensitivity
In this work, a low-cost resistive gas sensor based on graphene grown by CVD was fabricated and its sensitivity was studied in terms of defect density. CVD graphene was transferred using Polyurethane as sacrifice layer with low contamination and defect-free results. An atmospheric plasma etching sys...
| Main Authors: | , |
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| Format: | Article |
| Language: | English |
| Published: |
Hindawi Limited
2019-01-01
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| Series: | Journal of Sensors |
| Online Access: | http://dx.doi.org/10.1155/2019/5492583 |