Surface Roughness and Grain Size Characterization of Annealing Temperature Effect For Growth Gallium and Tantalum Doped Ba0.5 Sr0.5TiO3Thin Film

Surface Roughness and Grain Size Characterization of Annealing Temperature Effect For Growth Gallium and Tantalum Doped Ba0.5 Sr0.5TiO3Thin Film

Thin films 10 % gallium oxide doped barium strontium titanate (BGST) and 10 % tantalum oxide doped barium strontium titanate (BTST) were prepared on p-type Si (100) substrates using chemical solution deposition (CSD) method with 1.00 M precursor. The films were deposited by spin coating method with...

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Bibliographic Details
Main Authors: Irzaman, H. Darmasetiawan, H. Hardhienata
Format: Article
Language:English
Published: Center for Development of Nuclear Informatics, National Nuclear Energy Agency (BATAN) 2009-01-01
Series:Atom Indonesia
Subjects:
BGST
BTST
thin films
CSD method
AFM
roughness
grain size
Online Access:http://aij.batan.go.id/index.php/aij/article/view/48

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