Effect of acetylene content in working gas on microstructure and thermal stability of DLC coating
The DLC coatings were deposited onto the surface of 304 stainless steel by using PE-CVD method and Ar+C2H2 as working gas. The effects of the methane content in the working gas on the structure, hardness, thermal stability of the coating were analyzed by means of SEM, FTIR, Raman and nano-indenter....
| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
| Published: |
EDP Sciences
2020-01-01
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| Series: | E3S Web of Conferences |
| Online Access: | https://www.e3s-conferences.org/articles/e3sconf/pdf/2020/66/e3sconf_icgec2020_02022.pdf |