Modeling of Multifunctional Thermoresistive Transduser Used Heat Exchange Technology
The physical and technical characteristics, structural and topological aspects of the micromechanical thermo-resistor active heating transdusers synthesis for fluid (gas and liquid) parameters determination are considered. All transducers are based on a single MEMS (Micro Electro Mechanical System)...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Igor Sikorsky Kyiv Polytechnic Institute
2019-04-01
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| Series: | Mìkrosistemi, Elektronìka ta Akustika |
| Subjects: | |
| Online Access: | http://elc.kpi.ua/article/view/164410 |