An Investigation on Efficient Acoustic Energy Reflection of Flexible Film Bulk Acoustic Resonators
ABSTRACT: This paper investigates the issues on acoustic energy reflection of flexible film bulk acoustic resonators (FBARs). The flexible FBAR was fabricated with an air cavity in the polymer substrate, which endowed the resonator with efficient acoustic reflection and high electrical performance....
| Main Authors: | , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
AIP Publishing LLC
2018-06-01
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| Series: | Nanotechnology and Precision Engineering |
| Online Access: | http://www.sciencedirect.com/science/article/pii/S2589554018300278 |