Designing the Topology of a Unipolar Pulsed-DC Power Supply using the Open-source Scilab/Xcos Software for a Low-cost Plasma Etcher
We proposed a design topology for a unipolar pulsed direct-current power supply to produce low-cost reactive plasma etcher system. The design was simulated by a block diagram method using the open-source software Scilab/Xcos, and the results were validated by prototyping the power supply. In the top...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
KeAi Communications Co., Ltd.
2020-01-01
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| Series: | Solid State Electronics Letters |
| Subjects: | |
| Online Access: | http://www.sciencedirect.com/science/article/pii/S2589208820300144 |