A novel deflection shape function for rectangular capacitive micromachined ultrasonic transducer diaphragms
A highly accurate analytical deflection shape function that describes the deflection profiles of capacitive micromachined ultrasonic transducers (CMUTs) with rectangular membranes under electrostatic pressure has been formulated. The rectangular diaphragms have a thickness range of 0.6–1.5 μm and a...
| Main Authors: | , , , , , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
Elsevier
2015-09-01
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| Series: | Sensing and Bio-Sensing Research |
| Online Access: | http://www.sciencedirect.com/science/article/pii/S2214180415300076 |