Effects of process parameters on μc - Si1 − XGeX:H solar cells performance and material properties

Effects of process parameters on μc - Si1 − XGeX:H solar cells performance and material properties

On our way to develop a very thin and highly efficient triple-junction thin-film solar cell in a-Si:H/μc-Si:H/μc-SiGe:H configuration and μc-SiGe:H single cell samples were prepared and characterized using an industrial relevant 13.56 MHz 0.5 nm/s process on an industrial like 30 × 30 cm2 P...

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Bibliographic Details
Main Authors:	Reininghaus Nies, Kellermann Martin, von Maydell Karsten, Agert Carsten
Format:	Article
Language:	English
Published:	EDP Sciences 2015-01-01
Series:	EPJ Photovoltaics
Online Access:	http://dx.doi.org/10.1051/epjpv/2015002

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