Effects of process parameters on μc - Si1 − XGeX:H solar cells performance and material properties
On our way to develop a very thin and highly efficient triple-junction thin-film solar cell in a-Si:H/μc-Si:H/μc-SiGe:H configuration and μc-SiGe:H single cell samples were prepared and characterized using an industrial relevant 13.56 MHz 0.5 nm/s process on an industrial like 30 × 30 cm2 P...
| Main Authors: | , , , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
EDP Sciences
2015-01-01
|
| Series: | EPJ Photovoltaics |
| Online Access: | http://dx.doi.org/10.1051/epjpv/2015002 |