Effects of process parameters on μc - Si1 − XGeX:H solar cells performance and material properties

Effects of process parameters on μc - Si1 − XGeX:H solar cells performance and material properties

On our way to develop a very thin and highly efficient triple-junction thin-film solar cell in a-Si:H/μc-Si:H/μc-SiGe:H configuration and μc-SiGe:H single cell samples were prepared and characterized using an industrial relevant 13.56 MHz 0.5 nm/s process on an industrial like 30 × 30 cm2 P...

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Main Authors: Reininghaus Nies, Kellermann Martin, von Maydell Karsten, Agert Carsten
Format: Article
Language:English
Published: EDP Sciences 2015-01-01
Series:EPJ Photovoltaics
Online Access:http://dx.doi.org/10.1051/epjpv/2015002
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spelling doaj-e7dbca16cba846deaa79e7f2d57cf7b42021-04-02T14:52:29ZengEDP SciencesEPJ Photovoltaics2105-07162015-01-0166530110.1051/epjpv/2015002pv140019Effects of process parameters on μc - Si1 − XGeX:H solar cells performance and material propertiesReininghaus NiesKellermann Martinvon Maydell KarstenAgert Carsten On our way to develop a very thin and highly efficient triple-junction thin-film solar cell in a-Si:H/μc-Si:H/μc-SiGe:H configuration and μc-SiGe:H single cell samples were prepared and characterized using an industrial relevant 13.56 MHz 0.5 nm/s process on an industrial like 30 × 30 cm2 PECVD tool. To attain a better understanding of the μc-SiGe:H absorber we varied process pressure, germane flow, dilution and silane flow while looking at the electrical and material properties. By realizing a total absorber thickness less than 2 μm for high efficiency cell concepts in triple technology, our intention is to develop an industrial relevant process with attractive fabrication times by benefiting from the enhanced absorption of μc-SiGe:H compared to μc-Si:H. http://dx.doi.org/10.1051/epjpv/2015002
collection DOAJ
language English
format Article
sources DOAJ
author Reininghaus Nies
Kellermann Martin
von Maydell Karsten
Agert Carsten
spellingShingle Reininghaus Nies
Kellermann Martin
von Maydell Karsten
Agert Carsten
Effects of process parameters on μc - Si1 − XGeX:H solar cells performance and material properties
EPJ Photovoltaics
author_facet Reininghaus Nies
Kellermann Martin
von Maydell Karsten
Agert Carsten
author_sort Reininghaus Nies
title Effects of process parameters on μc - Si1 − XGeX:H solar cells performance and material properties
title_short Effects of process parameters on μc - Si1 − XGeX:H solar cells performance and material properties
title_full Effects of process parameters on μc - Si1 − XGeX:H solar cells performance and material properties
title_fullStr Effects of process parameters on μc - Si1 − XGeX:H solar cells performance and material properties
title_full_unstemmed Effects of process parameters on μc - Si1 − XGeX:H solar cells performance and material properties
title_sort effects of process parameters on μc - si1 − xgex:h solar cells performance and material properties
publisher EDP Sciences
series EPJ Photovoltaics
issn 2105-0716
publishDate 2015-01-01
description On our way to develop a very thin and highly efficient triple-junction thin-film solar cell in a-Si:H/μc-Si:H/μc-SiGe:H configuration and μc-SiGe:H single cell samples were prepared and characterized using an industrial relevant 13.56 MHz 0.5 nm/s process on an industrial like 30 × 30 cm2 PECVD tool. To attain a better understanding of the μc-SiGe:H absorber we varied process pressure, germane flow, dilution and silane flow while looking at the electrical and material properties. By realizing a total absorber thickness less than 2 μm for high efficiency cell concepts in triple technology, our intention is to develop an industrial relevant process with attractive fabrication times by benefiting from the enhanced absorption of μc-SiGe:H compared to μc-Si:H.
url http://dx.doi.org/10.1051/epjpv/2015002
work_keys_str_mv AT reininghausnies effectsofprocessparametersonmcsi1xgexhsolarcellsperformanceandmaterialproperties
AT kellermannmartin effectsofprocessparametersonmcsi1xgexhsolarcellsperformanceandmaterialproperties
AT vonmaydellkarsten effectsofprocessparametersonmcsi1xgexhsolarcellsperformanceandmaterialproperties
AT agertcarsten effectsofprocessparametersonmcsi1xgexhsolarcellsperformanceandmaterialproperties
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