| Summary: | Available literature data for beryllium content in D-Be co-deposited layers was modeled using newly developed model. It was shown that the model adequately describes the experimental results. An empirical scaling for the available trap concentrations as a function of deuteron energy was introduced in order to improve the agreement between the experimental data and model predictions. The limited recombination rate describes the co-deposition better than the unlimited one. Assuming two types of traps in the film with detrapping energies of 0.8–0.9 and 1.2–1.3 eV and trap concentrations of 10 at. % and 1 at. %, respectively, and the deuterium implantation energy of 15.6 eV, the average relative deviation between experimental and predicted D/Be values of 1.9 was observed, which is better than the empirical D/Be scalings.
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