Theoretical and experimental investigation of the nonlinear response of an electrically actuated imperfect microbeam
In this study a theoretical and experimental investigation of the nonlinear response of an electrically actuated microbeam is performed. A mechanical model is proposed, which accounts for two common imperfections of microbeams, due to microfabrications, which are the compliant support conditions and...
| Main Authors: | , , , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
EDP Sciences
2012-07-01
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| Series: | MATEC Web of Conferences |
| Online Access: | http://dx.doi.org/10.1051/matecconf/20120104005 |