Effect of C/Si Moore Ratio on the Morphology and Crystallinity of 3C-SiC/Si(100) by the Modified Two-Step Carbonization Process
<p>A modified two-step carbonization process was used to growth high oriented 3C-SiC films on Si(100) substrates by using SiH<sub>4</sub> and C<sub>3</sub>H<sub>8</sub> as precursors. The investigation revealed that the C/Si Moore ratio has important influen...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Kaunas University of Technology
2017-08-01
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| Series: | Medžiagotyra |
| Subjects: | |
| Online Access: | http://matsc.ktu.lt/index.php/MatSc/article/view/16323 |