Design of Composite Disturbance Observer and Continuous Terminal Sliding Mode Control for Piezoelectric Nanopositioning Stage

Design of Composite Disturbance Observer and Continuous Terminal Sliding Mode Control for Piezoelectric Nanopositioning Stage

The nonlinearities of piezoelectric actuators and external disturbances of the piezoelectric nanopositioning stage impose great, undesirable influences on the positioning accuracy of nanopositioning stage systems. This paper considers nonlinearities and external disturbances as a lumped disturbance...

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Bibliographic Details
Main Authors:	Pengyu Qiao, Jun Yang, Chen Dai, Xi Xiao
Format:	Article
Language:	English
Published:	MDPI AG 2021-09-01
Series:	Electronics
Subjects:	piezoelectric nanopositioning stage sliding mode control disturbance rejection
Online Access:	https://www.mdpi.com/2079-9292/10/18/2242

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