Effect of Time Delay on Laser-Triggered Discharge Plasma for a Beyond EUV Source
We demonstrate the beyond extreme ultraviolet (BEUV) emission by a laser-triggered discharge source with the laser-current delay between 0.6 µs and 3 µs. The spectra at different electron temperatures are simulated theoretically, and the spectra at different laser-current delays ar...
Main Authors: | , , , |
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Format: | Article |
Language: | English |
Published: |
MDPI AG
2019-05-01
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Series: | Symmetry |
Subjects: | |
Online Access: | https://www.mdpi.com/2073-8994/11/5/658 |