A Simple Stable Inertial Nanopositioner with Piezoelectric Stacks
To build a simple and stable nanopositioner which can reduce the complexity of the scanning probe microscopy (SPM) system, a novel inertial nanopositioner with piezoelectric stacks is present ed. The nanopositioner adopts two piezoelectric stacks and one sawtooth driving signal to achieve movement....
| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
AIP Publishing LLC
2018-03-01
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| Series: | Nanotechnology and Precision Engineering |
| Online Access: | http://www.sciencedirect.com/science/article/pii/S2589554018300369 |