Influence of pulse poling on the piezoelectric property of Pb(Zr0.52,Ti0.48)O3 thin films

Influence of pulse poling on the piezoelectric property of Pb(Zr0.52,Ti0.48)O3 thin films

We have investigated the influence of pulse poling on the piezoelectric property of Pb(Zr0.52,Ti0.48)O3 (PZT) thin films. 1.9-μm-thick PZT thin films were deposited by sol-gel method and fabricated into microelectromechanical systems (MEMS) based piezoelectric microcantilevers. 1 kHz of...

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Bibliographic Details
Main Authors: Takeshi Kobayashi, Yasuhiro Suzuki, Natsumi Makimoto, Hiroshi Funakubo, Ryutaro Maeda
Format: Article
Language:English
Published: AIP Publishing LLC 2014-11-01
Series:AIP Advances
Online Access:http://dx.doi.org/10.1063/1.4901912

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