Perspective: Fundamentals of coalescence-related dislocations, applied to selective-area growth and other epitaxial films
Although selective area growth (SAG) and coalesced SAG (cSAG) have been utilized extensively for many years to moderate the material quality of lattice-mismatched films, the geometrical factors controlling dislocations in coalesced films are difficult to visualize, and some confusion regarding the t...
| Main Authors: | , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
AIP Publishing LLC
2018-12-01
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| Series: | APL Materials |
| Online Access: | http://dx.doi.org/10.1063/1.5047945 |