Perspective: Fundamentals of coalescence-related dislocations, applied to selective-area growth and other epitaxial films
Although selective area growth (SAG) and coalesced SAG (cSAG) have been utilized extensively for many years to moderate the material quality of lattice-mismatched films, the geometrical factors controlling dislocations in coalesced films are difficult to visualize, and some confusion regarding the t...
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Online Access: | http://dx.doi.org/10.1063/1.5047945 |
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doaj-e26a307ebd6b43dc9ec53249918ce47d2020-11-24T21:50:10ZengAIP Publishing LLCAPL Materials2166-532X2018-12-01612120903120903-1610.1063/1.5047945005811APMPerspective: Fundamentals of coalescence-related dislocations, applied to selective-area growth and other epitaxial filmsWilliam E. McMahon0Michelle Vaisman1Jeramy D. Zimmerman2Adele C. Tamboli3Emily L. Warren4National Renewable Energy Laboratory, Golden, Colorado 80401, USANational Renewable Energy Laboratory, Golden, Colorado 80401, USANational Renewable Energy Laboratory, Golden, Colorado 80401, USANational Renewable Energy Laboratory, Golden, Colorado 80401, USANational Renewable Energy Laboratory, Golden, Colorado 80401, USAAlthough selective area growth (SAG) and coalesced SAG (cSAG) have been utilized extensively for many years to moderate the material quality of lattice-mismatched films, the geometrical factors controlling dislocations in coalesced films are difficult to visualize, and some confusion regarding the topology of dislocations for cSAG still persists. In this paper, we describe the topology of dislocations during island coalescence for cSAG, framed in terms of fundamental dislocation properties and virtual dislocations, which are used as a helpful visualization tool. We also show how the results and methods are generally applicable to coalescence of any other epitaxial film.http://dx.doi.org/10.1063/1.5047945 |
collection |
DOAJ |
language |
English |
format |
Article |
sources |
DOAJ |
author |
William E. McMahon Michelle Vaisman Jeramy D. Zimmerman Adele C. Tamboli Emily L. Warren |
spellingShingle |
William E. McMahon Michelle Vaisman Jeramy D. Zimmerman Adele C. Tamboli Emily L. Warren Perspective: Fundamentals of coalescence-related dislocations, applied to selective-area growth and other epitaxial films APL Materials |
author_facet |
William E. McMahon Michelle Vaisman Jeramy D. Zimmerman Adele C. Tamboli Emily L. Warren |
author_sort |
William E. McMahon |
title |
Perspective: Fundamentals of coalescence-related dislocations, applied to selective-area growth and other epitaxial films |
title_short |
Perspective: Fundamentals of coalescence-related dislocations, applied to selective-area growth and other epitaxial films |
title_full |
Perspective: Fundamentals of coalescence-related dislocations, applied to selective-area growth and other epitaxial films |
title_fullStr |
Perspective: Fundamentals of coalescence-related dislocations, applied to selective-area growth and other epitaxial films |
title_full_unstemmed |
Perspective: Fundamentals of coalescence-related dislocations, applied to selective-area growth and other epitaxial films |
title_sort |
perspective: fundamentals of coalescence-related dislocations, applied to selective-area growth and other epitaxial films |
publisher |
AIP Publishing LLC |
series |
APL Materials |
issn |
2166-532X |
publishDate |
2018-12-01 |
description |
Although selective area growth (SAG) and coalesced SAG (cSAG) have been utilized extensively for many years to moderate the material quality of lattice-mismatched films, the geometrical factors controlling dislocations in coalesced films are difficult to visualize, and some confusion regarding the topology of dislocations for cSAG still persists. In this paper, we describe the topology of dislocations during island coalescence for cSAG, framed in terms of fundamental dislocation properties and virtual dislocations, which are used as a helpful visualization tool. We also show how the results and methods are generally applicable to coalescence of any other epitaxial film. |
url |
http://dx.doi.org/10.1063/1.5047945 |
work_keys_str_mv |
AT williamemcmahon perspectivefundamentalsofcoalescencerelateddislocationsappliedtoselectiveareagrowthandotherepitaxialfilms AT michellevaisman perspectivefundamentalsofcoalescencerelateddislocationsappliedtoselectiveareagrowthandotherepitaxialfilms AT jeramydzimmerman perspectivefundamentalsofcoalescencerelateddislocationsappliedtoselectiveareagrowthandotherepitaxialfilms AT adelectamboli perspectivefundamentalsofcoalescencerelateddislocationsappliedtoselectiveareagrowthandotherepitaxialfilms AT emilylwarren perspectivefundamentalsofcoalescencerelateddislocationsappliedtoselectiveareagrowthandotherepitaxialfilms |
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1725884903056211968 |