Perspective: Fundamentals of coalescence-related dislocations, applied to selective-area growth and other epitaxial films

Although selective area growth (SAG) and coalesced SAG (cSAG) have been utilized extensively for many years to moderate the material quality of lattice-mismatched films, the geometrical factors controlling dislocations in coalesced films are difficult to visualize, and some confusion regarding the t...

Full description

Bibliographic Details
Main Authors: William E. McMahon, Michelle Vaisman, Jeramy D. Zimmerman, Adele C. Tamboli, Emily L. Warren
Format: Article
Language:English
Published: AIP Publishing LLC 2018-12-01
Series:APL Materials
Online Access:http://dx.doi.org/10.1063/1.5047945
id doaj-e26a307ebd6b43dc9ec53249918ce47d
record_format Article
spelling doaj-e26a307ebd6b43dc9ec53249918ce47d2020-11-24T21:50:10ZengAIP Publishing LLCAPL Materials2166-532X2018-12-01612120903120903-1610.1063/1.5047945005811APMPerspective: Fundamentals of coalescence-related dislocations, applied to selective-area growth and other epitaxial filmsWilliam E. McMahon0Michelle Vaisman1Jeramy D. Zimmerman2Adele C. Tamboli3Emily L. Warren4National Renewable Energy Laboratory, Golden, Colorado 80401, USANational Renewable Energy Laboratory, Golden, Colorado 80401, USANational Renewable Energy Laboratory, Golden, Colorado 80401, USANational Renewable Energy Laboratory, Golden, Colorado 80401, USANational Renewable Energy Laboratory, Golden, Colorado 80401, USAAlthough selective area growth (SAG) and coalesced SAG (cSAG) have been utilized extensively for many years to moderate the material quality of lattice-mismatched films, the geometrical factors controlling dislocations in coalesced films are difficult to visualize, and some confusion regarding the topology of dislocations for cSAG still persists. In this paper, we describe the topology of dislocations during island coalescence for cSAG, framed in terms of fundamental dislocation properties and virtual dislocations, which are used as a helpful visualization tool. We also show how the results and methods are generally applicable to coalescence of any other epitaxial film.http://dx.doi.org/10.1063/1.5047945
collection DOAJ
language English
format Article
sources DOAJ
author William E. McMahon
Michelle Vaisman
Jeramy D. Zimmerman
Adele C. Tamboli
Emily L. Warren
spellingShingle William E. McMahon
Michelle Vaisman
Jeramy D. Zimmerman
Adele C. Tamboli
Emily L. Warren
Perspective: Fundamentals of coalescence-related dislocations, applied to selective-area growth and other epitaxial films
APL Materials
author_facet William E. McMahon
Michelle Vaisman
Jeramy D. Zimmerman
Adele C. Tamboli
Emily L. Warren
author_sort William E. McMahon
title Perspective: Fundamentals of coalescence-related dislocations, applied to selective-area growth and other epitaxial films
title_short Perspective: Fundamentals of coalescence-related dislocations, applied to selective-area growth and other epitaxial films
title_full Perspective: Fundamentals of coalescence-related dislocations, applied to selective-area growth and other epitaxial films
title_fullStr Perspective: Fundamentals of coalescence-related dislocations, applied to selective-area growth and other epitaxial films
title_full_unstemmed Perspective: Fundamentals of coalescence-related dislocations, applied to selective-area growth and other epitaxial films
title_sort perspective: fundamentals of coalescence-related dislocations, applied to selective-area growth and other epitaxial films
publisher AIP Publishing LLC
series APL Materials
issn 2166-532X
publishDate 2018-12-01
description Although selective area growth (SAG) and coalesced SAG (cSAG) have been utilized extensively for many years to moderate the material quality of lattice-mismatched films, the geometrical factors controlling dislocations in coalesced films are difficult to visualize, and some confusion regarding the topology of dislocations for cSAG still persists. In this paper, we describe the topology of dislocations during island coalescence for cSAG, framed in terms of fundamental dislocation properties and virtual dislocations, which are used as a helpful visualization tool. We also show how the results and methods are generally applicable to coalescence of any other epitaxial film.
url http://dx.doi.org/10.1063/1.5047945
work_keys_str_mv AT williamemcmahon perspectivefundamentalsofcoalescencerelateddislocationsappliedtoselectiveareagrowthandotherepitaxialfilms
AT michellevaisman perspectivefundamentalsofcoalescencerelateddislocationsappliedtoselectiveareagrowthandotherepitaxialfilms
AT jeramydzimmerman perspectivefundamentalsofcoalescencerelateddislocationsappliedtoselectiveareagrowthandotherepitaxialfilms
AT adelectamboli perspectivefundamentalsofcoalescencerelateddislocationsappliedtoselectiveareagrowthandotherepitaxialfilms
AT emilylwarren perspectivefundamentalsofcoalescencerelateddislocationsappliedtoselectiveareagrowthandotherepitaxialfilms
_version_ 1725884903056211968