PHOTOLITHOGRAPHY OF FILM STRUCTURES XEROGEL/POROUS ANODIC ALUMINA PREPARED IN VARIOUS ELECTROLYTES

PHOTOLITHOGRAPHY OF FILM STRUCTURES XEROGEL/POROUS ANODIC ALUMINA PREPARED IN VARIOUS ELECTROLYTES

The results of study the morphology of the microstructured porous anodic alumina films formed using electrochemical anodization, sol-gel synthesis, photolithography and chemical etching are given. The metal mask was not used in photolithography, because of fabrication the continuous xerogel film. Th...

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Bibliographic Details
Main Authors:	L. S. Khoroshko, A. M. Asharif, T. I. Orekhovskaya, M. V. Meledina, V. A. Sokol, B. S. Kolosnitsin, N. V. Gaponenko
Format:	Article
Language:	Russian
Published:	Educational institution «Belarusian State University of Informatics and Radioelectronics» 2019-06-01
Series:	Doklady Belorusskogo gosudarstvennogo universiteta informatiki i radioèlektroniki
Subjects:	пористый анодный оксид алюминия золь-гель фотолитография
Online Access:	https://doklady.bsuir.by/jour/article/view/314

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