PHOTOLITHOGRAPHY OF FILM STRUCTURES XEROGEL/POROUS ANODIC ALUMINA PREPARED IN VARIOUS ELECTROLYTES

PHOTOLITHOGRAPHY OF FILM STRUCTURES XEROGEL/POROUS ANODIC ALUMINA PREPARED IN VARIOUS ELECTROLYTES

The results of study the morphology of the microstructured porous anodic alumina films formed using electrochemical anodization, sol-gel synthesis, photolithography and chemical etching are given. The metal mask was not used in photolithography, because of fabrication the continuous xerogel film. Th...

Full description

Bibliographic Details
Main Authors: L. S. Khoroshko, A. M. Asharif, T. I. Orekhovskaya, M. V. Meledina, V. A. Sokol, B. S. Kolosnitsin, N. V. Gaponenko
Format: Article
Language:Russian
Published: Educational institution «Belarusian State University of Informatics and Radioelectronics» 2019-06-01
Series:Doklady Belorusskogo gosudarstvennogo universiteta informatiki i radioèlektroniki
Subjects:
пористый анодный оксид алюминия
золь-гель
фотолитография
Online Access:https://doklady.bsuir.by/jour/article/view/314
Description
Summary:The results of study the morphology of the microstructured porous anodic alumina films formed using electrochemical anodization, sol-gel synthesis, photolithography and chemical etching are given. The metal mask was not used in photolithography, because of fabrication the continuous xerogel film. The perspective of application of these structures in planar optoelectronics and photocatalyses are discussed.
ISSN:1729-7648

Similar Items