ELLIPSOMETRIC METHODS FOR CONTROL OF PARAMETERS OF MATERIALS AND RADIOELECTRONICS STRUCTURES

ELLIPSOMETRIC METHODS FOR CONTROL OF PARAMETERS OF MATERIALS AND RADIOELECTRONICS STRUCTURES

The possibilities of ellipsometric method for optimization of identification of refractive index of oxynitride dielectric films have been reviewed, the possibility of ellipsometry for identification of the thickness and optical constants of metal films and semiconductor compound FeSi2.

Bibliographic Details
Main Authors: S. Bogolyubovа, E. Polyakova, R. Rezvyi
Format: Article
Language:English
Published: CRI «Electronics» 2016-09-01
Series:Радиопромышленность
Subjects:
ellipsometry methods and programs
refractive index
optical constants oxynitride film
metal film
fesi2 film
Online Access:https://www.radioprom.org/jour/article/view/153
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spelling doaj-e1766541a748478ebb3290dc266c31012021-07-28T13:52:34ZengCRI «Electronics»Радиопромышленность2413-95992541-870X2016-09-01263596210.21778/2413-9599-2016-3-59-62148ELLIPSOMETRIC METHODS FOR CONTROL OF PARAMETERS OF MATERIALS AND RADIOELECTRONICS STRUCTURESS. Bogolyubovа0E. Polyakova1R. Rezvyi2OJSC «NPP “Pulsar”»FSUE «MNIIRIP»OOO NPP «Avtomatika-S»The possibilities of ellipsometric method for optimization of identification of refractive index of oxynitride dielectric films have been reviewed, the possibility of ellipsometry for identification of the thickness and optical constants of metal films and semiconductor compound FeSi2.https://www.radioprom.org/jour/article/view/153ellipsometry methods and programsrefractive indexoptical constants oxynitride filmmetal filmfesi2 film
collection DOAJ
language English
format Article
sources DOAJ
author S. Bogolyubovа
E. Polyakova
R. Rezvyi
spellingShingle S. Bogolyubovа
E. Polyakova
R. Rezvyi
ELLIPSOMETRIC METHODS FOR CONTROL OF PARAMETERS OF MATERIALS AND RADIOELECTRONICS STRUCTURES
Радиопромышленность
ellipsometry methods and programs
refractive index
optical constants oxynitride film
metal film
fesi2 film
author_facet S. Bogolyubovа
E. Polyakova
R. Rezvyi
author_sort S. Bogolyubovа
title ELLIPSOMETRIC METHODS FOR CONTROL OF PARAMETERS OF MATERIALS AND RADIOELECTRONICS STRUCTURES
title_short ELLIPSOMETRIC METHODS FOR CONTROL OF PARAMETERS OF MATERIALS AND RADIOELECTRONICS STRUCTURES
title_full ELLIPSOMETRIC METHODS FOR CONTROL OF PARAMETERS OF MATERIALS AND RADIOELECTRONICS STRUCTURES
title_fullStr ELLIPSOMETRIC METHODS FOR CONTROL OF PARAMETERS OF MATERIALS AND RADIOELECTRONICS STRUCTURES
title_full_unstemmed ELLIPSOMETRIC METHODS FOR CONTROL OF PARAMETERS OF MATERIALS AND RADIOELECTRONICS STRUCTURES
title_sort ellipsometric methods for control of parameters of materials and radioelectronics structures
publisher CRI «Electronics»
series Радиопромышленность
issn 2413-9599
2541-870X
publishDate 2016-09-01
description The possibilities of ellipsometric method for optimization of identification of refractive index of oxynitride dielectric films have been reviewed, the possibility of ellipsometry for identification of the thickness and optical constants of metal films and semiconductor compound FeSi2.
topic ellipsometry methods and programs
refractive index
optical constants oxynitride film
metal film
fesi2 film
url https://www.radioprom.org/jour/article/view/153
work_keys_str_mv AT sbogolyubova ellipsometricmethodsforcontrolofparametersofmaterialsandradioelectronicsstructures
AT epolyakova ellipsometricmethodsforcontrolofparametersofmaterialsandradioelectronicsstructures
AT rrezvyi ellipsometricmethodsforcontrolofparametersofmaterialsandradioelectronicsstructures
_version_ 1721270563993812992

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