TECHNOLOGICAL TECHNIQUES OF Al-Al<sub>2</sub>O<sub>3</sub> MICROSTRUCTURES FORMATION FOR POWERFUL ELECTROMECHANICAL SYSTEMS
Thus, Al-Al2O3 structures characteristic features of which are the considerable height (300 - 450 μm ) of contact pads and conducting lines, the high thickness (150 - 600 μm ) of insulating anodic alumina with high breakdown voltages between the contact pads (up to 8 kV) were made in the present wor...
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Educational institution «Belarusian State University of Informatics and Radioelectronics»
2019-06-01
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| Series: | Doklady Belorusskogo gosudarstvennogo universiteta informatiki i radioèlektroniki |
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| Online Access: | https://doklady.bsuir.by/jour/article/view/122 |
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doaj-e11732906e094743b7052bd40a4853102021-07-28T16:19:45ZrusEducational institution «Belarusian State University of Informatics and Radioelectronics»Doklady Belorusskogo gosudarstvennogo universiteta informatiki i radioèlektroniki1729-76482019-06-01084449121TECHNOLOGICAL TECHNIQUES OF Al-Al<sub>2</sub>O<sub>3</sub> MICROSTRUCTURES FORMATION FOR POWERFUL ELECTROMECHANICAL SYSTEMSV. A. Sokol0D. L. Shimanovich1G. V. Litvinovich2Белорусский государственный университет информатики и радиоэлектроникиБелорусский государственный университет информатики и радиоэлектроникиБелорусский государственный университет информатики и радиоэлектроникиThus, Al-Al2O3 structures characteristic features of which are the considerable height (300 - 450 μm ) of contact pads and conducting lines, the high thickness (150 - 600 μm ) of insulating anodic alumina with high breakdown voltages between the contact pads (up to 8 kV) were made in the present work. Such structures may be used in power electromechanical systems. Methods of the high-speed anodization, of the deep anodization and chemical etching were investigated to provide practically vertical walls in the Al-Al2O3 system.https://doklady.bsuir.by/jour/article/view/122алюминийанодированиеалюмооксидная технологияанодный оксид алюминиямикроструктура al-al<sub>2</sub>o<sub>3</sub>проводящие контактные площадки и дорожкимежэлементная изоляциягрунтовкапробивные напряжения |
| collection |
DOAJ |
| language |
Russian |
| format |
Article |
| sources |
DOAJ |
| author |
V. A. Sokol D. L. Shimanovich G. V. Litvinovich |
| spellingShingle |
V. A. Sokol D. L. Shimanovich G. V. Litvinovich TECHNOLOGICAL TECHNIQUES OF Al-Al<sub>2</sub>O<sub>3</sub> MICROSTRUCTURES FORMATION FOR POWERFUL ELECTROMECHANICAL SYSTEMS Doklady Belorusskogo gosudarstvennogo universiteta informatiki i radioèlektroniki алюминий анодирование алюмооксидная технология анодный оксид алюминия микроструктура al-al<sub>2</sub>o<sub>3</sub> проводящие контактные площадки и дорожки межэлементная изоляция грунтовка пробивные напряжения |
| author_facet |
V. A. Sokol D. L. Shimanovich G. V. Litvinovich |
| author_sort |
V. A. Sokol |
| title |
TECHNOLOGICAL TECHNIQUES OF Al-Al<sub>2</sub>O<sub>3</sub> MICROSTRUCTURES FORMATION FOR POWERFUL ELECTROMECHANICAL SYSTEMS |
| title_short |
TECHNOLOGICAL TECHNIQUES OF Al-Al<sub>2</sub>O<sub>3</sub> MICROSTRUCTURES FORMATION FOR POWERFUL ELECTROMECHANICAL SYSTEMS |
| title_full |
TECHNOLOGICAL TECHNIQUES OF Al-Al<sub>2</sub>O<sub>3</sub> MICROSTRUCTURES FORMATION FOR POWERFUL ELECTROMECHANICAL SYSTEMS |
| title_fullStr |
TECHNOLOGICAL TECHNIQUES OF Al-Al<sub>2</sub>O<sub>3</sub> MICROSTRUCTURES FORMATION FOR POWERFUL ELECTROMECHANICAL SYSTEMS |
| title_full_unstemmed |
TECHNOLOGICAL TECHNIQUES OF Al-Al<sub>2</sub>O<sub>3</sub> MICROSTRUCTURES FORMATION FOR POWERFUL ELECTROMECHANICAL SYSTEMS |
| title_sort |
technological techniques of al-al<sub>2</sub>o<sub>3</sub> microstructures formation for powerful electromechanical systems |
| publisher |
Educational institution «Belarusian State University of Informatics and Radioelectronics» |
| series |
Doklady Belorusskogo gosudarstvennogo universiteta informatiki i radioèlektroniki |
| issn |
1729-7648 |
| publishDate |
2019-06-01 |
| description |
Thus, Al-Al2O3 structures characteristic features of which are the considerable height (300 - 450 μm ) of contact pads and conducting lines, the high thickness (150 - 600 μm ) of insulating anodic alumina with high breakdown voltages between the contact pads (up to 8 kV) were made in the present work. Such structures may be used in power electromechanical systems. Methods of the high-speed anodization, of the deep anodization and chemical etching were investigated to provide practically vertical walls in the Al-Al2O3 system. |
| topic |
алюминий анодирование алюмооксидная технология анодный оксид алюминия микроструктура al-al<sub>2</sub>o<sub>3</sub> проводящие контактные площадки и дорожки межэлементная изоляция грунтовка пробивные напряжения |
| url |
https://doklady.bsuir.by/jour/article/view/122 |
| work_keys_str_mv |
AT vasokol technologicaltechniquesofalalsub2subosub3submicrostructuresformationforpowerfulelectromechanicalsystems AT dlshimanovich technologicaltechniquesofalalsub2subosub3submicrostructuresformationforpowerfulelectromechanicalsystems AT gvlitvinovich technologicaltechniquesofalalsub2subosub3submicrostructuresformationforpowerfulelectromechanicalsystems |
| _version_ |
1721268007659896832 |