Electrostatic Micro-Electro-Mechanical-Systems (MEMS) Devices: A Comparison Among Numerical Techniques for Recovering the Membrane Profile
In this work, numerical techniques based on Shooting procedure, Relaxation scheme and Collocation technique have been used for recovering the profile of the membrane of a 1D electrostatic Micro-Electro-Mechanical-Systems (MEMS) device whose analytic model considers |E| proportional to the membrane c...
| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
| Published: |
IEEE
2020-01-01
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| Series: | IEEE Access |
| Subjects: | |
| Online Access: | https://ieeexplore.ieee.org/document/9137153/ |