Linear encoder based low frequency inertial sensor
For many applications, there is an increasing demand for low cost, high-resolution inertial sensors, which are capable of operating in harsh environments. Recently, a prototype of small optical inertial sensor has been built, using a Michelson interferometer. A resolution of 3 pm/√Hz has been obtain...
| Main Authors: | , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
EDP Sciences
2015-01-01
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| Series: | MATEC Web of Conferences |
| Online Access: | http://dx.doi.org/10.1051/matecconf/20153206001 |