Chemical deposition from gas phase of the hetero and nanostructures of III–V compounds
This is a report of experimental result in-situ metod UV-Spectroscopy on the gas phase composition in the source region GaAs, GaP, In, Ga, In/Ga of gas-flov reactor. The kinetics of individual reactions was determined for a wide range of flow rates and temperatures. The received experimental data we...
| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
| Published: |
Politehperiodika
2008-10-01
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| Series: | Tekhnologiya i Konstruirovanie v Elektronnoi Apparature |
| Subjects: | |
| Online Access: | http://www.tkea.com.ua/tkea/2008/5_2008/pdf/06.zip |