Caracterización estructural mediante elipsometría espectral de multicapas basadas en SiO<sub>2</sub>
We have characterised PECVD-grown non-stoichiometric silicon oxides (SiOx) and thick waveguide structures based on these materials with spectroscopic ellipsometry. We have developed a fit method that allows detailed analysis of complicated ellipsometric spectra, such as those of thick (~10 μm) multi...
| Main Authors: | , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
Elsevier
2000-12-01
|
| Series: | Boletín de la Sociedad Española de Cerámica y Vidrio |
| Subjects: | |
| Online Access: | http://ceramicayvidrio.revistas.csic.es/index.php/ceramicayvidrio/article/view/773/801 |