Operando Study of Thermal Oxidation of Monolayer MoS2

Abstract Monolayer MoS2 is a promising semiconductor to overcome the physical dimension limits of microelectronic devices. Understanding the thermochemical stability of MoS2 is essential since these devices generate heat and are susceptible to oxidative environments. Herein, the promoting effect of...

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Bibliographic Details
Main Authors: Sangwook Park, Angel T. Garcia‐Esparza, Hadi Abroshan, Baxter Abraham, John Vinson, Alessandro Gallo, Dennis Nordlund, Joonsuk Park, Taeho Roy Kim, Lauren Vallez, Roberto Alonso‐Mori, Dimosthenis Sokaras, Xiaolin Zheng
Format: Article
Language:English
Published: Wiley 2021-05-01
Series:Advanced Science
Subjects:
Online Access:https://doi.org/10.1002/advs.202002768