Effect of Axial Force on the Performance of Micromachined Vibratory Rate Gyroscopes

Effect of Axial Force on the Performance of Micromachined Vibratory Rate Gyroscopes

It is reported in the published literature that the resonant frequency of a silicon micromachined gyroscope decreases linearly with increasing temperature. However, when the axial force is considerable, the resonant frequency might increase as the temperature increases. The axial force is mainly ind...

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Bibliographic Details
Main Authors: Zhengyi Niu, Xu Zhang, Peitao Dong, Zhihua Chen, Zhanqiang Hou, Dingbang Xiao, Xuezhong Wu
Format: Article
Language:English
Published: MDPI AG 2010-12-01
Series:Sensors
Subjects:
micromachined vibratory gyroscope
thermal stress
resonant frequency
slanted beam
temperature characteristics
anodic bonding
Online Access:http://www.mdpi.com/1424-8220/11/1/296/

Internet

http://www.mdpi.com/1424-8220/11/1/296/

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