Macro Modeling of V-Shaped Electro-Thermal MEMS Actuator with Human Error Factor

Macro Modeling of V-Shaped Electro-Thermal MEMS Actuator with Human Error Factor

The V-shaped electro-thermal MEMS actuator model, with the human error factor taken into account, is presented in this paper through the cascading ANSYS simulation model and the Fuzzy mathematics calculation model. The Fuzzy mathematics calculation model introduces the human error factor into the ME...

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Bibliographic Details
Main Authors: Dongpeng Zhang, Anjiang Cai, Yulong Zhao, Tengjiang Hu
Format: Article
Language:English
Published: MDPI AG 2021-05-01
Series:Micromachines
Subjects:
macro modeling
electro-thermal actuator
fuzzy mathematics calculation model
BP neural network
human error factor
Online Access:https://www.mdpi.com/2072-666X/12/6/622
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spelling doaj-dce6ce7be0be4f8d927d6cd1fee0ea382021-06-01T01:24:26ZengMDPI AGMicromachines2072-666X2021-05-011262262210.3390/mi12060622Macro Modeling of V-Shaped Electro-Thermal MEMS Actuator with Human Error FactorDongpeng Zhang0Anjiang Cai1Yulong Zhao2Tengjiang Hu3School of Mechanical and Electrical Engineering, Xi’an University of Architecture and Technology, Xi’an 710055, ChinaSchool of Mechanical and Electrical Engineering, Xi’an University of Architecture and Technology, Xi’an 710055, ChinaState Key Laboratory for Manufacturing System Engineering, Xi’an Jiaotong University, Xi’an 710049, ChinaState Key Laboratory for Manufacturing System Engineering, Xi’an Jiaotong University, Xi’an 710049, ChinaThe V-shaped electro-thermal MEMS actuator model, with the human error factor taken into account, is presented in this paper through the cascading ANSYS simulation model and the Fuzzy mathematics calculation model. The Fuzzy mathematics calculation model introduces the human error factor into the MEMS actuator model by using the BP neural network, which effectively reduces the error between ANSYS simulation results and experimental results to less than 1%. Meanwhile, the V-shaped electro-thermal MEMS actuator model, with the human error factor included, will become more accurate as the database of the V-shaped electro-thermal actuator model grows.https://www.mdpi.com/2072-666X/12/6/622macro modelingelectro-thermal actuatorfuzzy mathematics calculation modelBP neural networkhuman error factor
collection DOAJ
language English
format Article
sources DOAJ
author Dongpeng Zhang
Anjiang Cai
Yulong Zhao
Tengjiang Hu
spellingShingle Dongpeng Zhang
Anjiang Cai
Yulong Zhao
Tengjiang Hu
Macro Modeling of V-Shaped Electro-Thermal MEMS Actuator with Human Error Factor
Micromachines
macro modeling
electro-thermal actuator
fuzzy mathematics calculation model
BP neural network
human error factor
author_facet Dongpeng Zhang
Anjiang Cai
Yulong Zhao
Tengjiang Hu
author_sort Dongpeng Zhang
title Macro Modeling of V-Shaped Electro-Thermal MEMS Actuator with Human Error Factor
title_short Macro Modeling of V-Shaped Electro-Thermal MEMS Actuator with Human Error Factor
title_full Macro Modeling of V-Shaped Electro-Thermal MEMS Actuator with Human Error Factor
title_fullStr Macro Modeling of V-Shaped Electro-Thermal MEMS Actuator with Human Error Factor
title_full_unstemmed Macro Modeling of V-Shaped Electro-Thermal MEMS Actuator with Human Error Factor
title_sort macro modeling of v-shaped electro-thermal mems actuator with human error factor
publisher MDPI AG
series Micromachines
issn 2072-666X
publishDate 2021-05-01
description The V-shaped electro-thermal MEMS actuator model, with the human error factor taken into account, is presented in this paper through the cascading ANSYS simulation model and the Fuzzy mathematics calculation model. The Fuzzy mathematics calculation model introduces the human error factor into the MEMS actuator model by using the BP neural network, which effectively reduces the error between ANSYS simulation results and experimental results to less than 1%. Meanwhile, the V-shaped electro-thermal MEMS actuator model, with the human error factor included, will become more accurate as the database of the V-shaped electro-thermal actuator model grows.
topic macro modeling
electro-thermal actuator
fuzzy mathematics calculation model
BP neural network
human error factor
url https://www.mdpi.com/2072-666X/12/6/622
work_keys_str_mv AT dongpengzhang macromodelingofvshapedelectrothermalmemsactuatorwithhumanerrorfactor
AT anjiangcai macromodelingofvshapedelectrothermalmemsactuatorwithhumanerrorfactor
AT yulongzhao macromodelingofvshapedelectrothermalmemsactuatorwithhumanerrorfactor
AT tengjianghu macromodelingofvshapedelectrothermalmemsactuatorwithhumanerrorfactor
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