Simulation study of reduced self-heating in β-Ga2O3 MOSFET on a nano-crystalline diamond substrate

We propose nano-crystalline diamond (NCD) as a heteroepitaxial substrate for beta-gallium oxide (β-Ga2O3), and investigate self-heating effect in β-Ga2O3 MOSFET on the NCD compared with a native Ga2O3 and other alternative substrate (SiC) using physics-based TCAD simulation. The NCD substrate with h...

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Main Authors: J. Oh, J. Ma, G. Yoo
Format: Article
Language:English
Published: Elsevier 2019-06-01
Series:Results in Physics
Online Access:http://www.sciencedirect.com/science/article/pii/S2211379719306345
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spelling doaj-dcd2921718b941159f8dffa48f8a1ae52020-11-25T00:20:24ZengElsevierResults in Physics2211-37972019-06-0113Simulation study of reduced self-heating in β-Ga2O3 MOSFET on a nano-crystalline diamond substrateJ. Oh0J. Ma1G. Yoo2School of Electronic Engineering, Soongsil University, Seoul 06938, South KoreaSchool of Electronic Engineering, Soongsil University, Seoul 06938, South KoreaCorresponding author.; School of Electronic Engineering, Soongsil University, Seoul 06938, South KoreaWe propose nano-crystalline diamond (NCD) as a heteroepitaxial substrate for beta-gallium oxide (β-Ga2O3), and investigate self-heating effect in β-Ga2O3 MOSFET on the NCD compared with a native Ga2O3 and other alternative substrate (SiC) using physics-based TCAD simulation. The NCD substrate with high thermal conductivity reduces a lattice temperature of β-Ga2O3 and thus mitigates drain current degradation. Furthermore, the benefits become more pronounced with device scaling. These results suggest that the low-cost NCD can be a promising heteroepitaxial substrate for β-Ga2O3 devices applications.http://www.sciencedirect.com/science/article/pii/S2211379719306345
collection DOAJ
language English
format Article
sources DOAJ
author J. Oh
J. Ma
G. Yoo
spellingShingle J. Oh
J. Ma
G. Yoo
Simulation study of reduced self-heating in β-Ga2O3 MOSFET on a nano-crystalline diamond substrate
Results in Physics
author_facet J. Oh
J. Ma
G. Yoo
author_sort J. Oh
title Simulation study of reduced self-heating in β-Ga2O3 MOSFET on a nano-crystalline diamond substrate
title_short Simulation study of reduced self-heating in β-Ga2O3 MOSFET on a nano-crystalline diamond substrate
title_full Simulation study of reduced self-heating in β-Ga2O3 MOSFET on a nano-crystalline diamond substrate
title_fullStr Simulation study of reduced self-heating in β-Ga2O3 MOSFET on a nano-crystalline diamond substrate
title_full_unstemmed Simulation study of reduced self-heating in β-Ga2O3 MOSFET on a nano-crystalline diamond substrate
title_sort simulation study of reduced self-heating in β-ga2o3 mosfet on a nano-crystalline diamond substrate
publisher Elsevier
series Results in Physics
issn 2211-3797
publishDate 2019-06-01
description We propose nano-crystalline diamond (NCD) as a heteroepitaxial substrate for beta-gallium oxide (β-Ga2O3), and investigate self-heating effect in β-Ga2O3 MOSFET on the NCD compared with a native Ga2O3 and other alternative substrate (SiC) using physics-based TCAD simulation. The NCD substrate with high thermal conductivity reduces a lattice temperature of β-Ga2O3 and thus mitigates drain current degradation. Furthermore, the benefits become more pronounced with device scaling. These results suggest that the low-cost NCD can be a promising heteroepitaxial substrate for β-Ga2O3 devices applications.
url http://www.sciencedirect.com/science/article/pii/S2211379719306345
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AT jma simulationstudyofreducedselfheatinginbga2o3mosfetonananocrystallinediamondsubstrate
AT gyoo simulationstudyofreducedselfheatinginbga2o3mosfetonananocrystallinediamondsubstrate
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